Electronic – Given metal dimensions and material, is it possible to determine the maximum current that the structure can handle? [semiconductor processing]

fusespowerresistivitysemiconductorsthermal

I have a linewidth structure that has very low resistance. I want to know the maximum current that this structure can handle.

Since the resistance of the metal is so low, it's hard to measure the voltage drop. We can't change the size of the structure (as it's on all our masks and we're also limited in real estate) and we can't increase the voltage resolution of our tester (without sacrificing capacity or spending money).

So the only solution that I can think of is to increase the test current.

I've been searching for an equation or series of equations that will tell me at what current the structure will break (like a fuse). I'm sure that, given the structure dimensions (LWH) and the material parameters (resistivity, thermal conductance, etc), this or other similar equation exists. However, I can't seem to figure it out…

And then, to make things more complicated, I'm pulsing this current with a pulse width <= 100ms. It's normally only a single pulse, so a duty cycle doesn't make much sense.

Thanks,

Best Answer

Well, there are papers out there such as this one that predict the fusing current limits. The current limits set for normal long-term continous operation of ICs are not limited by fusing current, but by electromigration, so they'd be pretty conservative.

You could also just sacrifice a few samples to determine what the limits are empirically.

I'm not sure this will lead to the results you want- whether it's aluminum or copper or something else, the metal is going to have a significant temperature coefficient, and if you're pulsing it so it heats up by hundreds of K, how will you separate the temperature effect from the room-temperature resistance? I suppose if you had enough points you could extrapolate a curve back into the grass where the temperature change is minimal.

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I know every problem doesn't have a circuit design as the solution, but could you just make a preamplifier for your tester?