Electronic – Impact of the channel length on the threshold voltage in CMOS transistor

cmosphysicstransistors

Is there a monotonic relation between the channel length and threshold Voltage and is it proportional or inverse?

Best Answer

The short answer is - yes.

The slightly longer answer, it depends on the fabrication details of the transistor and it's targeted use case.

In all cases, below a critical length \$V_{TH}\$ decreases with decreasing length. However once this critical length is met the \$V_{TH}\$ can increase, stay the same or decrease. Here are some pictures.

enter image description here image 1: flat

enter image description here image 2: decreasing

enter image description here image 3: increasing

There is also a correspondance between Gate Oxide thickness, the S/D structure design and this critical length.