Electronic – What does “spin on” mean

integrated-circuitmems

In the begining of section 17.2 (chapter 17) of Digital Integrated Circuits: Analysis and Design the auther says:

There are positive and negative resists. The use of a positive resist
for pattern transfer is illustrated in Figure 17.1. First, a fresh
layer of silicon dioxide is grown over the entire wafer. Then, the
wafer is coated with a thin layer of positive photoresist. This
photoresist is spun on and then baked to the desired hardness.

I understand most of the text, but I cant't understand the meaning of "spun on".

Best Answer

I found my answer in Wikipedia:

Spin coating is a procedure used to deposit uniform thin films to flat substrates. Usually a small amount of coating material is applied on the center of the substrate, which is either spinning at low speed or not spinning at all. The substrate is then rotated at high speed in order to spread the coating material by centrifugal force. A machine used for spin coating is called a spin coater, or simply spinner.

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