Electrical – Finfet Device – Fin thickness vs Channel length

finfetmosfet

Finfet

I dont understand why fin thickness has to be greater than channel length as stated below:

As long as the fin thickness (body thickness), Tsi, is smaller than
Lg, the short-channel effects are well suppressed and the subthreshold
swing is basically the theoretical best case

Please help me explain why?
Thanks very much!

Best Answer

In MOSFET one wants the gate electric field to control the channel and drain electric field should have a lesser effect on the channel. Otherwise it will not work as expected and will show a set of unwanted effects called Short-channel Effects.

In order to reduce the effect of drain field on channel, the gate length (or channel length) is usually made (45x) longer than oxide thickness for a planar structure. In case of a FinFET, the gate electric field is decided by the thickness of silicon fin (Tsi) and hence it is made smaller than the channel length or gate length (Lg).